Solution for equipment quartz parts cleaning
SPM manufactures special equipment for cleaning quartz parts that are dismantled from process equipment like LPE 3061, LPE2061 and ASM machines.
These equipment, can clean all quartz parts that needs cleaning during maintenance operations. For cleaning small parts in the same equipment, we designed dedicated parts basket that fit inside a special tank for cleaning.
We have been producing semiconductor equipment for years and got a great experience. This allowed us to perfectionate our technology and tools.
The cleaning process is achieved using chemical attack on quartz parts.
The machine is totally automatic; after loading the parts to be cleaned, the system will prepare the solution starting from pure chemicals inside a mixing tank. Different process and rinse steps are executed sub sequentially and at the end the dryer phase starts using hot H2ODI and then hot N2, both directly produced by dedicated heaters.
Chemical filling can be from CDS or from bottle station depending on customer request.
Every system we realize is tailored according to customer’s requirements. We are expert in identify at first meeting, client’s necessities, so we can propose the correct solution for each problem.
Configuration of the system can vary based on the quartz parts that you need to clean. Here a list of our equipment:
- Athens Model: LPE 2061 QUARTZ BELL JAR CLEANING SYSTEM
- Cairo Model: LPE 3061 QUARTZ CHAMBER & PROCESS KIT CLEANING SYSTEM
- Manila Model: LPE 3061 QUARTZ CHAMBER & LPE 2061 QUARTZ BELL JAR AND PROCESS KIT CLEANING SYSTEM
- Monaco Model: ASM QUARTZ CHAMBER AND PROCESS KIT CLEANING SYSTEM
- Nice Model: LPE 2061 QUARTZ BELL JAR, ASM CHAMBER AND PROCESS KIT CLEANING SYSTEM
- Piraeus Model: LPE 2061 OR AMC 7810-7820 QUARTZ BELL JAR AND PROCESS KIT CLEANING SYSTEM
- Agrigento Model: CHAMBER LPE 3061, SMALL PARTS, BELL JAR AND QUARTZ TUBES CLEANING SYSTEM
- Sunnyvale Model: LPE 3061, ASM QUARTZ CHAMBERS AND PROCESS KIT CLEANING SYSTEM
All SPM equipment are ruled by PLC and touch screen to manage entire system.
Software is developed by SPM engineers with modern graphic and with extensive features like:
- Recipe management
- Datalogging: real time and historical
- P&I direct control: act directly on valves and pumps for maintenance
- Host SECS-GEM interface (optional)
All tools are realized following safety CE rules.