Full automatic solar cells acid/alkaline texturing
SPM manufactures solar cells texturing wet benches in different version according with customer requirements.
We realize various types of tools from manual hood to full automatic wet benches with robot.
We have been producing semiconductor equipment for years and got a great experience. This allowed us to perfectionate our technology and tools.
The wet benches we propose can be:
Every system we realize is tailored according to customer’s requirements. We are expert in identify at first meeting, client’s necessities, so we can propose the correct solution for each problem.
For solvents we normally adopt stainless steel materials according with safety rules in term of anti-fire protection. With Acids-Bases we use specific corrosion resistant plastics materials (also FM4910 Approved).
In both cases we use just high-performance materials that guaranteed no chemical contamination or degradation, safety and long equipment lifetime.
Rinse, process and dryer tanks are designed and realized by SPM using only top performance materials and latest construction technologies.
Wet benches can be configured to operates single or double carrier.
Wet benches tanks
Wet benches tanks can be equipped with several options:
- Balance at load and unload to measure the efficiency of texturing
- Quick dump rinse
- Overflow 360°
- Up/Dw Agitation with configurable height and frequency
- Solution Temperature control: heating-Chilling
- Solution Filtering
- Solution Recirculation with different pumps and flow control options
- Solution mixing and spiking
- Refilling system from CDS or integrated with bottles/canisters
- N2 bubbles
- Controlled atmosphere
- Vapors condensation
- Ph meter
- Concentration monitor
- Redox meter
- Resistivity meter
- Automatic cover
Wet benches options
Automatic wet benches offer great advantages, because they accomplish all processes in automatic mode (from carrier loading to carrier unloading); this means that operator’s presence is not needed.
These automatic wet benches are useful in case of elevated productivity, or when you require a very strict control of process, because the absence of human contact drastically reduces contamination and increase repeatability.
Minimal typical composition is:
- Load station;
- Process tank;
- Rinse tank;
- Unload station.
Customers can personalize the line adding several process and rinse tanks.
SPM realizes automatic wet benches in different versions, as for instance with robot located in the back section, or in the front wet section. Wet benches design can be linear or carousel to save tool length.
Robot allows precise carrier transfer from one tank to another warranting:
₪ Multitasking (several carriers loaded at the same time in different tanks)
₪ Safety for operators
₪ Reduced wafers mechanical stress
₪ low contamination
₪ Human error reduction to minimum
₪ Repeatability of processes
Robots we use have exposed parts duly shielded in specific material (according to employed chemical), to warrant maximum compatibility, minimum solution contamination and equipment long life.
- Exhaust automatic management
- Laminar flow with HEPA filters
All SPM wet benches are ruled by PLC and touch screen to manage entire system. Software is developed by SPM engineers with modern graphic and with extensive features like:
- Recipe management
- Datalogging: real time and historical
- P&I direct control: act directly on valves and pumps for maintenance
- Host SECS-GEM interface (optional)
All tools are realized following safety CE rules. We can build our equipment with ATEX certification in case it’s needed.