Chemical Delivery System
CDS are equipment that distributes chemicals from the package of the producer directly to process equipment. That concept reduces chemical contamination, consumption and degradation and increase safety for operators and equipment lifetime.
CDS – Chemical Distribution systems can be realized in different versions according to customer needs and chemical type. For solvents we normally adopt stainless steel materials according with safety rules in term of anti-fire protection. With Acids-Bases we use specific corrosion resistant plastics materials (also FM4882 Approved).
In both cases we use just high performance materials that guaranteed no chemical contamination or degradation, safety and long equipment lifetime. SPM CDS can be realized in order to distribute chemicals into the fab starting from 1000 liters IBC containers, 200 liters drums, canisters and bottles with different capacity.
We normally install redundant pumps in order to guarantee the continuous distribution to point of use even with one pump fault.
Basic system is composed with a drum/IBC housing and a pump that distribute directly from it without any reserve of chemical. For increase reserve and to avoid non-stop during drum/IBC changing we install a day tank and or a second drum/IBC housing.
Only high quality components are used inside our tools. As standard we use Metal Free valves for high purity products. We can provide flowmeters to monitor the flow rate, balance for volume controlling and refractometers for chemical analysis.
PLC controls entire function of the CDS. From the touch screen, users can check the status of the system, change settings and do maintenance operations. All CDS are realized following safety CE rules.
We can build our equipment with ATEX certification in case it’s needed.
SPM can provide distribution implant supervision software fully customizable with your needs, with multiple access stations that directly interface with multiple equipment PLCs.