Custom solutions for automated wafer manipulations

SPM has great experience in automation. We are able to realizes equipment with automatic single wafer load/unload station. This tool can be integrated inside our equipment or sold separately as transfer station for example from basket to process carrier.

We have experience manipulating ultra-thin wafers, photo-mask and other components. Axis technology can vary according to budge, precision, and travel stroke.

We are also able to integrate third party system like wafer handling robot that cooperate with our machines PLC.


Robot can be protected against harsh environment with sealed high-quality plastic covers custom designed by SPM. That design creates the chemical resistant robot that can operates close to process tanks that generates acid fumes and spills.

Every system we realize is tailored according to customer’s requirements. We are expert in identify at first meeting, client’s necessities, so we can propose the correct solution for each problem.
All tools are realized following safety CE rules.

prototype for wafer transfer system from basket to quartz carrier



Single wafer automatic transfer systems


Single solar cell automatic transfer systems