Solution for equipment quartz parts cleaning

SPM manufactures special equipment for cleaning quartz parts that are dismantled from process equipment like quartz tube, boats, thermocouple shields, etc.

These equipment, can clean all quartz parts that needs cleaning during maintenance operations. For cleaning small parts in the same equipment, we designed dedicated special tank for cleaning.

We have been producing semiconductor equipment for years and got a great experience. This allowed us to perfectionate our technology and tools.

The cleaning process is achieved using chemical attack on quartz parts.

The machine is totally automatic; after loading the parts to be cleaned, the system will prepare the solution starting from pure chemicals inside a mixing tank. Different process and rinse steps are executed sub sequentially and at the end the dryer phase starts using hot H2ODI and then hot N2, both directly produced by dedicated heaters.

Chemical filling

Every system we realize is tailored according to customer’s requirements. We are expert in identify at first meeting, client’s necessities, so we can propose the correct solution for each problem.

Configuration of the system can vary based on the quartz parts that you need to clean and cleanroom space. The process of cleaning could be vertical or horizontal.

All SPM equipment are ruled by PLC and touch screen to manage entire system. Software is developed by SPM engineers with modern graphic and with extensive features like:

  • Recipe management
  • Datalogging: real time and historical
  • P&I direct control: act directly on valves and pumps for maintenance
  • Host SECS-GEM interface (optional)

All tools are realized following safety CE rules.

Vertical quartz tube automatic cleaning system



Oxidation-doping Quartz parts cleaning systems


Oxidation-doping Quartz/Graphite parts cleaning systems