Waste Wafer Destruction system

Tiger Shark is an automatic system for wafer destruction. It is dedicated to wafers that don’t pass the final test (flash technology).

This equipment destroys wafer using chemicals and can be used also for masks destruction, using specific solutions.

This system is in automatic version, for 25 wafer single carrier, 8”-12”. Inside the process tank, after chemical treatment, there will be a rinse phase. Etch solution is recovered and stored into another tank, underneath, for re-use.

Automatic waste wafer destruction equipment

Waste Wafer

Waste Wafer destruction equipment are ruled by PLC and touch screen to manage entire system. Software is developed by SPM engineers with modern graphic and with extensive features like:

  • Recipe management
  • Datalogging: real time and historical
  • P&I direct control: act directly on valves and pumps for maintenance
  • Host SECS-GEM interface (optional)

All tools are realized following safety CE rules.



Automatic waste wafer destruction equipments